2015/03 2016/03 2017/03 2018/03 2019/3
Semiconductor Production Equipment 40,179 41,773 50,291 59,523 69,117
Metrology Instruments 26,266 28,500 27,501 28,671 32,403
Total 66,445 70,274 77,792 88,194 101,520

2015/03 2016/03 2017/03 2018/03 2019/3
Semiconductor Production Equipment 6,963 7,339 8,820 11,292 13,195
Metrology Instruments 5,160 5,883 4,839 5,990 7,025
Total 12,124 13,222 13,659 17,283 20,221