2018/03 2019/3 2020/3 2021/3 2022/3
Semiconductor Production Equipment 59,523 69,117 56,198 71,745 103,360
Metrology Instruments 28,671 32,403 31,728 25,359 29,917
Total 88,194 101,520 87,927 97,105 133,277

2018/03 2019/3 2020/3 2021/3 2022/3
Semiconductor Production Equipment 11,292 13,195 7,915 13,565 24,893
Metrology Instruments 5,990 7,025 4,366 1,996 3,657
Total 17,283 20,221 12,282 15,562 28,550