2016/03 2017/03 2018/03 2019/3 2020/3
Semiconductor Production Equipment 41,773 50,291 59,523 69,117 56,198
Metrology Instruments 28,500 27,501 28,671 32,403 31,728
Total 70,274 77,792 88,194 101,520 87,927

2016/03 2017/03 2018/03 2019/3 2020/3
Semiconductor Production Equipment 7,339 8,820 11,292 13,195 7,915
Metrology Instruments 5,883 4,839 5,990 7,025 4,366
Total 13,222 13,659 17,283 20,221 12,282