2017/03 2018/03 2019/3 2020/3 2021/3
Semiconductor Production Equipment 50,291 59,523 69,117 56,198 71,745
Metrology Instruments 27,501 28,671 32,403 31,728 25,359
Total 77,792 88,194 101,520 87,927 97,105

2017/03 2018/03 2019/3 2020/3 2021/3
Semiconductor Production Equipment 8,820 11,292 13,195 7,915 13,565
Metrology Instruments 4,839 5,990 7,025 4,366 1,996
Total 13,659 17,283 20,221 12,282 15,562